O kasa fa'aeletoroni fa'apitoa e iai le fluorine e aofia aisulfur hexafluoride (SF6), tungsten hexafluoride (WF6),carbon tetrafluoride (CF4), trifluoromethane (CHF3), nitrogen trifluoride (NF3), hexafluoroethane (C2F6) ma le octafluoropropane (C3F8).
Faʻatasi ai ma le atinaʻeina o nanotechnology ma le faʻalauteleina o le atinaʻeina o pisinisi eletise, o lona manaʻoga o le a faʻateleina i lea aso ma lea aso. Nitrogen trifluoride, e avea o se kesi eletise faʻapitoa e manaʻomia ma sili ona faʻaaogaina i le gaosiga ma le gaosiga o panels ma semiconductors, o loʻo i ai se avanoa lautele maketi.
I le avea o se ituaiga o kasa faʻapitoa e iai le fluorine,nitrogen trifluoride (NF3)o le mea fa'aeletonika fa'apitoa kasa fa'atasi ma le tele o le gafatia maketi. E chemically inert i le vevela potu, sili atu le malosi nai lo le okesene i le vevela maualuga, sili atu mautu nai lo fluorine, ma faigofie ona taulimaina. Nitrogen trifluoride e masani ona faʻaaogaina e avea o se kasa etching plasma ma se mea e faʻamamaina ai le potu tali, ma e talafeagai mo le gaosiga o fanua o meataalo semiconductor, faʻaaliga laulau mafolafola, fiber opitika, sela photovoltaic, ma isi.
Pe a faatusatusa i isi kasa faaeletonika e iai le fluorine,nitrogen trifluorideei ai le lelei o le tali vave ma le maualuga maualuga. Aemaise lava i le togitogiina o mea o loʻo i ai le silicon e pei o le silicon nitride, e maualuga lona fua faʻatatau ma le filifilia, e leai se mea e totoe i luga o le mea na togitogia. E lelei tele fo'i le fa'amama ma e leai se fa'aleagaina i luga, lea e mafai ona fa'amalieina mana'oga o le faagasologa o le gaosiga.
Taimi meli: Sep-14-2024
