Carbon Tetrafluoride (CF4)

Vaega Fa'atekinisi

O le carbon tetrafluoride ose hydrocarbon halogenated ma le fua fa'atatau CF4.E mafai ona fa'atatauina o se mea fa'ameamea, methane halogenated, perfluorocarbon, po'o se mea fa'apipi'i fa'amasani.O le carbon tetrafluoride o se kasa e leai se lanu ma e leai se manogi, e le mafai ona solu ile vai, e mafai ona solu ile benzene ma le chloroform.Taofi i lalo o le vevela masani ma le mamafa, aloese mai mea faʻamaʻi malolosi, mea e mu pe mu.O le kasa e le mafai ona mu, o le a faʻateleina le mamafa o totonu o le pusa pe a faʻaalia i le vevela maualuga, ma e iai le lamatiaga o le taʻe ma le pa.E mautu i kemikolo ma e le mu.Na'o le ammonia-sodium metal reagent e mafai ona galue i le vevela o le potu.O le carbon tetrafluoride o se kesi e mafua ai le aafiaga o le greenhouse.E matua mautu, e mafai ona tumau i le ea mo se taimi umi, ma o se kesi kesi malosi tele.O le carbon tetrafluoride o loʻo faʻaaogaina i le faʻagasologa o le plasma etching process o vaʻaiga tuʻufaʻatasia eseese.E faʻaaogaina foʻi e pei o se kasa leisa, ma faʻaaogaina i pusa malulu maualalo, solvents, lubricants, insulating material, ma coolants mo infrared detectors.O le kesi etching plasma sili ona fa'aaogaina i le pisinisi microelectronics.O se faʻafefiloi o le tetrafluoromethane high-purity gas ma le tetrafluoromethane high-purity gas ma maualuga-mama okesene.E mafai ona faʻaaogaina lautele i le silicon, silicon dioxide, silicon nitride, ma tioata phosphosilicate.O le faʻaogaina o mea ata tifaga manifinifi e pei o le tungsten ma le tungsten e faʻaaogaina lautele i luga o le faʻamamaina o masini faʻaeletoroni, gaosiga o le la, tekinolosi leisa, pusaaisa maualalo-vevela, suʻesuʻega leak, ma le faʻamalama i le gaosiga o le matagaluega.Fa'aaogaina e fai ma fa'a'a'a'a'ai maualalo ma le plasma dry etching technology mo feso'ota'iga tu'ufa'atasi.Lapataiga mo le teuina: Teu i totonu ose faleteuoloa kesi malulu, ea e le mu.Taofi mai le afi ma le vevela.Ole vevela ole teuina e le tatau ona sili atu ile 30°C.E tatau ona teu ese mai mea faigofie (mu) ma mea fa'ama'i, ma aloese mai le teuina fa'afefiloi.O le nofoaga e teu ai e tatau ona faʻapipiʻiina i masini faʻalavelave faʻafuaseʻi liki.

Talosaga:

① Pusa:

O le Tetrafluoromethane e fa'aaogaina i nisi taimi e fai ma fa'aaisa maualalo le vevela.

② Tusia:

E fa'aaogaina i mea fa'akomepiuta microfabrication na'o ia pe fa'atasi ma le okesene e avea o se plasma etchant mo silicon, silicon dioxide, ma silicon nitride.

afifi masani:

Tulaga lelei:

①Mama maualuga, fale fou;

②ISO gaosi tusi faamaonia;

③Tuuina atu vave;

④Faiga su'esu'e i luga ole laiga mo le pulea lelei i laasaga uma;

⑤Manaoga maualuga ma le faʻagasologa faʻapitoa mo le faʻaogaina o le paʻu aʻo leʻi faʻatumu;