leisa kasa

O le kasa leisa e masani ona fa'aaogaina mo le fa'aogaina o le laser ma le lithography gas i le alamanuia tau eletise. Faʻamanuiaina mai le faʻafouina o lau telefoni feaveaʻi ma le faʻalauteleina o nofoaga faʻaoga, o le fua o le maketi o le polysilicon maualalo maualalo o le a faʻalauteleina, ma o le faʻaogaina o le laser ua faʻaleleia atili le faʻatinoga o TFTs. Faatasi ai ma le neon, fluorine, ma argon kasa o loʻo faʻaaogaina i le ArF excimer laser mo le gaosiga o semiconductor, neon tala mo le sili atu i le 96% o le paluga kasa laser. Faʻatasi ai ma le faʻaleleia o tekonolosi semiconductor, ua faʻateleina le faʻaogaina o le laser excimer, ma o le faʻalauiloaina o tekinolosi faʻalua faʻaalia ua mafua ai le faʻateleina o le manaʻoga mo neon gas e faʻaaogaina e ArF excimer lasers. Faʻamanuiaina mai le faʻalauiloaina o le faʻaogaina o kasa faʻapitoa faʻaeletoroni, o le a maua e le au gaosi oloa i totonu o le atunuʻu se avanoa sili atu le tuputupu aʻe o maketi i le lumanaʻi.

Lithography masini o le meafaigaluega autu o semiconductor gaosiga. Lithography e faʻamatalaina le tele o transistors. O le fa'amaopoopoina o le atina'e o le lithography alamanuia filifili o le ki lea i le fa'atosinaina o masini lithography. O mea fa'akomepiuta fa'afetaui e pei o le photoresist, photolithography gas, photomask, ma le fa'apipi'iina ma le atina'eina o mea faigaluega e maualuga mea fa'atekonolosi. Lithography gas o le kesi lea e gaosia e le masini lithography le laser loloto ultraviolet. O kasa lithography eseese e mafai ona maua mai ai le malamalama o galu eseese, ma o latou galu e aafia saʻo ai le fofo o le masini lithography, o se tasi lea o fatu o le masini lithography. I le 2020, o le aofaʻi o faʻatauga i le lalolagi atoa o masini lithography o le a 413 iunite, o le ASML faʻatau atu 258 iunite na maua mo le 62%, Canon faʻatau 122 iunite faʻatatau mo le 30%, ma Nikon faʻatau 33 iunite faʻatatau mo le 8%.