Kesi fa'apitoaese mai le lautelekasa tau pisinisii le i ai o latou faʻaoga faʻapitoa ma faʻaaogaina i vaega faʻapitoa. E iai a latou manaʻoga faʻapitoa mo le mama, mea le mama, tuʻufaʻatasiga, ma mea faʻapitoa ma vailaʻau. Pe a fa'atusatusa i kasa fa'apisinisi, o kasa fa'apitoa e sili atu ona 'ese'ese 'ese'ese ae la'ititi la'ititi o gaosiga ma fa'atauga.

O lekasa fefiloimakasa fa'avasega masanie masani ona matou fa'aogaina o vaega taua o kasa fa'apitoa. O kasa fefiloi e masani ona vaevaeina i kasa fefiloi lautele ma kasa fefiloi faaeletonika.

O kasa fefiloi lautele e aofia ai:kasa fefiloi leisa, meafaifa'aili su'esu'ega kasa fefiloi, kasa fefiloi fa'asao, fa'asao kasa fefiloi, moli eletise fa'afefiloi kasa, su'esu'ega fa'afoma'i ma meaola fa'afefiloi kasa, fa'ama'i ma fa'amama fa'amama kasa fefiloi, kasa fa'afefiloi meafaigāluega, kasa fefiloi maualuga, ma le ea e leai se vasega.

O fa'afefiloi kasa fa'aeletoroni e aofia ai fa'afefiloi kasa epitaxial, fa'afefiloi kasa fa'afu kemisi, fa'afefiloi kasa doping, fa'afefiloi kasa etching, ma isi fa'afefiloi kasa fa'aeletoroni. O nei kesi paluga e faia se sao taua i le semiconductor ma microelectronics alamanuia ma e masani ona faʻaaogaina i le tele-scale integrated circuit (LSI) ma le tele tele-scale integrated circuit (VLSI) gaosiga, faʻapea foʻi ma le gaosiga o masini semiconductor.

5 Ituaiga o kasa fefiloi faaeletonika e masani ona faʻaaogaina

Doping kesi fefiloi

I le gaosiga o masini semiconductor ma fesoʻotaʻiga tuʻufaʻatasia, o loʻo tuʻuina atu ni mea leaga i totonu o mea semiconductor e tuʻuina atu ai le manaʻomia o le conductivity ma le resistivity, e mafai ai ona gaosia le tetee, PN junctions, tanumia lapisi, ma isi mea. O kasa o lo'o fa'aaogaina i le faiga o le doping e ta'ua o kasa dopant. O nei kasa e aofia ai arsenic, phosphine, phosphorus trifluoride, phosphorus pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, ma le diborane. O le puna o le dopant e masani lava ona fefiloi ma se kasa (e pei o le argon ma le nitrogen) i totonu o se kapoti puna. O le kesi fefiloi e fa'aauau pea ona tui i totonu o se ogaumu fa'asalalau ma fa'ata'amilo solo i le wafer, ma tu'u ai le dopant i luga o le mea'ai. Ona tali atu lea o le dopant i le silicon e fai ai se uamea dopant e alu atu i totonu o le silicon.

Epitaxial growth gas paluga

O le tuputupu aʻe o le epitaxial o le faʻagasologa lea o le teuina ma le faʻatupuina o se mea tioata se tasi i luga o se mea faʻapipiʻi. I totonu o pisinisi semiconductor, o kasa na faʻaaogaina e faʻatupu ai se tasi pe sili atu laulau o mea e faʻaaoga ai vailaʻau vaʻa (CVD) i luga o se mea e filifilia ma le faaeteete e taʻua o kasa epitaxial. O kasa epitaxial silicon masani e aofia ai dihydrogen dichlorosilane, silicon tetrachloride, ma silane. E masani ona faʻaaogaina mo le faʻapipiʻiina o le silicon epitaxial, polycrystalline silicon deposition, silicon oxide film deposition, silicon nitride film deposition, ma le amorphous silicon film deposition mo sela sola ma isi masini photosensitive.

kasa fa'atūina ion

I totonu o masini semiconductor ma le gaosiga fa'atasi, o kasa o lo'o fa'aaogaina i le fa'agasologa o le fa'apipi'iina o ion o lo'o ta'ua fa'atasi o kasa fa'atosina. O mea eleelea ua ionized (e pei o le boron, phosphorus, ma arsenic ions) e faatelevaveina i se maualuga maualuga a'o le'i totoina i totonu o le mea'ai. Ion implantation technology e sili ona fa'aoga lautele e pulea ai le voltage paepae. O le aofaʻi o mea leaga faʻapipiʻi e mafai ona fuafua e ala i le fuaina o le ion beam i le taimi nei. O kasa fa'apipi'i iona e masani ona aofia ai kasa phosphorus, arsenic, ma boron.

Etching kesi fefiloi

Etching o le faagasologa o le etching ese luga o le faagasologa (e pei o le uʻamea ata, silicon oxide film, ma isi) i luga o le substrate e le o ufimata e photoresist, ao faasaoina le vaega ufimata e photoresist, ina ia maua ai le mamanu ata manaomia i luga o le substrate surface.

Fa'afefiloi Kasa Fa'afefiloi ausa Vailaau

Ole fa'afu ole vaila'au ole vaila'au (CVD) e fa'aogaina mea fa'afefiloi e teu ai se vaila'au se tasi po'o se fa'afefiloi e ala i se fa'a'ave'avega fa'a-vau. Ole auala lea e fai ai ata tifaga e fa'aogaina ai fa'agaioiga vaila'au fa'asolosolo ausa. O kasa CVD o lo'o fa'aaogaina e fesuisuia'i e fa'atatau i le ituaiga ata o lo'o faia.