Boron trichloride (BCl3)ose fa'amea fa'akomepiuta e masani ona fa'aogaina i le fa'amamago ma le vaila'au ausa (CVD) fa'agasologa i le gaosiga semiconductor. Ose kasa e leai ni lanu ma se manogi malosi i le vevela o le potu ma e maaleale i le susū o le ea aua e fa'asuavai e maua ai le hydrochloric acid ma le boric acid.

Fa'aaogāga ole Boron Trichloride

I totonu o pisinisi semiconductor,Boron trichloridee masani ona faʻaaogaina mo le faʻamago etching o alumini ma e avea o se dopant e fausia P-ituaiga itulagi i luga ole kasa wafers. E mafai foʻi ona faʻaaogaina e faʻapipiʻi ai mea e pei o GaAs, Si, AlN, ma o se puna boron i nisi faʻaoga patino. E le gata i lea, o le Boron trichloride e masani ona faʻaaogaina i le gaosiga o uʻamea, fale tioata, suʻesuʻega vailaʻau ma suʻesuʻega suʻesuʻe.

Saogalemu o Boron Trichloride

Boron trichloridee pala ma oona ma e mafai ona afaina tele ai mata ma pa'u. E fa'asuavai ile ea susū e fa'asa'oloto ai kasa oona ole hydrogen chloride. O le mea lea, e tatau ona faia ni puipuiga talafeagai pe a taulimainaBoron trichloride, e aofia ai le ofuina o lavalava puipui, mata tioata ma mea faigaluega e puipuia ai le manava, ma le faʻaogaina i se siosiomaga faʻalelei lelei.