"TY", Taiyu Gas, I luga o le "Mauga TAI", "HJ", HongJin Gas, o se lumanaʻi manuia.
19 Tausaga Alamanuia Gases gaosiga sapalai poto masani, tasi-taofi alamanuia kesi sapalai
Fofo i le lalolagi, Lagolago le toe fa'atumu o kesi, su'esu'ega o le kesi, fa'ata'ita'iga o le kesi, ma felauaiga kesi. fa'ataga faigofie le matou tagata fa'atau kesi.
Suau'u Kasa | CH4, C2H2, CO, |
Uila Kasa | Ar-He, Ar-H2, Ar-O2, Ar-CO2, CO2, O2, N2, H2 , Ar-He-CO2, Ar-He-N2, |
Kasa Suavai | C2H4, SO2, CO2, NO2, N2O, C3F6, H2S, HCl, BCl3, BF3,SF6 |
Kasa Fa'ata'oto | CH4-N2, NO-N2, H2S-N2, CO2-N2, SF6-N2, SiH4-He |
Kasa Fa'a'au'au | AsH3, PH3, GeH4, B2H6, AsCl3, AsF3, H2S, BF3, BCl3, |
Tuputupu tioata | SiH4, SiHCl3, SiCl4, B2H6, BCl3, AsH3, PH3, GeH4, Ar, He, H2 |
Vaega kesi togitogi | Cl2, HCl, HF, HBr, SF6 |
togitogiga plasma | SiF4, CF4, C3F8, CHF3, C2F6, NF3, SF6, BCl3, N2, Ar, He |
Ion Beam Etching | C3F8, CHF3, CClF3, CF4 |
Fa'atosina o le ion | AsF3, PF3, PH3, BF3, BCl3, SiF4, SF6, N2, H2 |
CVD Gases | SiH4, SiH2Cl2, SiCl4, NH3, NO, O2 |
Kasa fa'asusu | N2, Ar, Ia, H2, CO2, N2O, O2 |
Kasa Fa'a'au'au | SiH4, SiCl4, Si2H6, HCl, PH3, AsH3, B2H6, N2, Ar, He, H2 |
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